[27p-G22-2] Recent development of SiC single crystal substrates
Keywords:炭化ケイ素、転位欠陥
Symposium(Oral presentation)
Symposium » ・The frontiers of SiC power electronics technology ~prospects of wide-range practical applications and survey of remaining issues~
Wed. Mar 27, 2013 1:00 PM - 6:00 PM G22 (B5 4F-2406)
Keywords:炭化ケイ素、転位欠陥