[27p-G4-1~11] Recent progress of evaluation of surfaces and interfaces in GaN-based materials --As an approach starting from material physics for device improvement

[27p-G4-7] Gas species effects on degradation of electrical properties of n-GaN upon plasma exposure

Naoki Hongo¹, ^○Takuma Takimoto¹, Seiji Nakamura¹, Tsugunori Okumura¹ (Tokyo Metropolitan Univ.¹)

Keywords:GaN、plasma、defect