[27p-PA2-1~22] 5.3 Optical Control

[27p-PA2-12] ▲Dark Current Suppression for Ni/Ge Schottky Junction by Plasma Post-Oxidation Passivation

^○Jian Kang¹, Rui Zhang¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (The Univ. of Tokyo¹)

Keywords:dark current suppression、Ni/Ge、plasma post-oxidation