[27p-PA2-1~22] 5.3 Optical Control

[27p-PA2-9] △Fabrication of waveguide with Si/SiGe/Si core for SiGe optical modulator

^○Younghyun Kim¹, Takenori Osada², Masahiko Hata², Mitsuru Takenaka¹, Shinichi Takagi¹ (The University of Tokyo¹, Sumitomo Chemical Co. Ltd.²)

Keywords:光変調器　Modulator、SiGe