[27p-PA4-1~17] 8. Plasma Electronics

[27p-PA4-4] Infrared Absorption Spectroscopy of a Deposition Process of Amorphous Canrbon Film Using Benzene as a Source Molecule (8.2)

Yuya Takaki¹, Yoshiki Takami¹, Takayoshi Tsumura¹, Shouhei Yagi¹, Yujiro Taniguchi¹, Naoki Maruno¹, ^○Masanori Shinohara¹, Yoshinobu Matsuda¹, Hiroshi Fujiyama¹ (Nagasaki Univ.¹)

Keywords:赤外分光、ベンゼン、アモルファス状炭素膜