[27p-PA4-1~17] 8. Plasma Electronics

[27p-PA4-6] Measurement of Ar ion energy in combining an ion irradiation and a sputtering deposition (8.2)

^○Masanari Ejiri¹, Taro Miyayama¹, Noriaki Ikenaga¹, Yoichi Kishi¹, Zenjiro Yajima¹, Noriyuki Sakudo¹ (Kanazawa Inst.¹)

Keywords:スパッタリング、イオン照射