The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Poster presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

[27p-PB4-1~16] 13.5 Si process technology

Wed. Mar 27, 2013 1:30 PM - 3:30 PM PB4 (2nd gymnasium)

[27p-PB4-11] Impact of Carbon Coimplantation on Boron Activation in Silicon

Yasuo Shimizu1, Hisashi Takamizawa1, Koji Inoue1, Fumiko Yano1,2, Yasuyoshi Nagai1 (IMR Tohoku Univ.1, Tokyo City Univ.2)

Keywords:アトムプローブ、炭素、共注入