[27p-PB4-1~16] 13.5 Si process technology

[27p-PB4-15] Mn doping to Si with Bi nanoline

^○（M1）Satoshi Tsubomatsu^1,2, Koichi Murata^1,2, Tamotsu Koyano², Koh-ichi Nittoh¹, Kazushi Miki^1,2 (NIMS¹, Univ. of Tsukuba²)

Keywords:Doping、Silicon、Mn