[27p-PB4-1~16] 13.5 Si process technology

[27p-PB4-16] Tungsten-Based Pillar Deposition by Helium Ion Microscope and Beam-Substrate Interaction

^○（P）Kazuyuki Kohama^1,2, Tomohiko Iijima¹, Misa Hayashida¹, Shinichi Ogawa¹ (AIST¹, JSPS²)

Keywords:HIM、ブリスタリング、エッチング