High performance poly-Si Thin Film Transistors with One-dimensionally Long Silicon Grain

Presentation information

Regular sessions(Poster presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

Wed. Mar 27, 2013 1:30 PM - 3:30 PM PB4 (2nd gymnasium)

^○（B）Masayuki Yamano¹, Shin-Ichiro Kuroki¹, Tadashi Sato¹, Koji Kotani² (Hiroshima Univ. RNBS¹, Tohoku Univ.²)

Keywords:レーザー結晶化、poly-Si