[28a-A2-1~9] 3.4 Optical measurement

[28a-A2-3] Surface profiling in terms of closed loop double shearing interferometry

Daisuke Sato¹, ^○（D）Tetsuya Hashimoto¹, Masaki Obara¹, Sirawit Teeranutranont¹, Kyu Yoshimori¹ (Graduate School of Eng., Iwate Univ.¹)

Keywords:干渉計測、シアリング干渉計、表面計測