[28a-A2-1~9] 3.4 Optical measurement

[28a-A2-6] Signal processing techniques for shape measurement of thin films in multiple-wavelength interferometry

^○Osami Sasaki¹, Samuel Choi¹, Yoshihiko Nakano¹, Takamasa Suzuki¹ (Niigata University¹)

Keywords:干渉計、多波長、薄膜