[28a-A4-1~10] 16.3 Bulk, thin-film and other silicon-based solar cells

[28a-A4-3] △Chracterization of the a-SiC:H/a-Si:H interface structure by real-time spectroscopic ellipsometry and infrared spectroscopy

^○Masanoi Sato¹, Hiroyuki Fujiwara¹ (Gifu Univ.¹)

Keywords:分光エリプソメトリー、赤外分光、界面構造