[28a-A4-1~10] 16.3 Bulk, thin-film and other silicon-based solar cells

[28a-A4-6] △Quantum Chemical Calculations on Effect of Radical Species on PECVD Process for Thin-Film Silicon Solar Cells

^○（M2）Takuya Kuwahara¹, Hiroshi Ito¹, Takeshi Ishikawa¹, Yuji Higuchi¹, Nobuki Ozawa¹, Momoji Kubo¹ (Tohoku Univ.¹)

Keywords:Tight-Binding量子分子動力学法、密度汎関数理論