[28a-A4-1~10] 16.3 Bulk, thin-film and other silicon-based solar cells

[28a-A4-9] Formation of a-Si:H Films by Liquid-source Vapor Deposition under Atmospheric Pressure (Film Properties)

^○Takashi Masuda^1,2, Zhongrong Shen^1,3, Hideyuki Takagishi^1,3, Pham Tien Lam^1,3, Keisuke Ohdaira^1,3, Tatsuya Shimoda^1,2,3 (JAIST¹, JST-ERATO², JST-ALCA³)

Keywords:silicon solar cell