[28a-A6-1~10] 6.2 Carbon-based thin films

[28a-A6-2] Refractive index and extinction coefficient of a-C:H film irradiated with soft X-ray

^○Hisashi Yoshioka¹, Ryo Imai², Kazuhiro Kanda², Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹, Univ. of Hyogo²)

Keywords:アモルファス水素化炭素膜、軟X線、屈折率　消光係数