[28a-A6-1~10] 6.2 Carbon-based thin films

[28a-A6-6] △Increase in Preparation Rate of Hydrogen-free DLC Film on Bottom of Narrow Hole

^○Yusuke Morita¹, Hideto Tanoue¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Nobuhiro Tsuji³, Saleh Abusuilik⁴ (Toyohashi Univ. Technol.¹, Itoh Optical Ind. Co., Ltd.², Onward Ceramic Coating Co., Ltd.³, Hitachi Tool Eng., Ltd.⁴)

Keywords:Diamond-lke carbon、細孔底面