[28a-B8-1~11] 9.2 Nanowires, nanoparticles

[28a-B8-10] Segregation behavior of phosphorus atoms in silicon nanowires during thermal oxidation

^○Jun Kaminaga^1,2, Ryo Takiguchi², Keitarou Suzuki^1,2, Syunichi Hishita¹, Takashi Sekiguchi¹, Kouichi Murakami², Naoki Fukata^1,2 (NIMS¹, Tsukuba Univ.²)

Keywords:ナノワイヤ、電子共鳴スピン