[28a-D3-8] Low-temperature fabrication of BiFeO3 based multiferroic thin films with (111) orientation by sputtering deposition process with VHF plasma irradiation
Keywords:マルチフェロイック薄膜、VHFプラズマ照射
Presentation information
Regular sessions(Oral presentation)
06. Thin Films and Surfaces » 6.1 Ferroelectric thin films
[28a-D3-1~10] 6.1 Ferroelectric thin films
Thu. Mar 28, 2013 10:00 AM - 12:45 PM D3 (C5 3F-324)