[28a-G12-1~11] 17.1 Growth technology

[28a-G12-1] Carbon Nanotube Growth at High-Aspect Ultrafine Via Holes and Its Electrical Characterization

^○Yuichi Yamazaki¹, Tatsuro Saito¹, Makoto Wada¹, Li Zhang¹, Masayuki Kitamura¹, Masayuki Katagiri¹, Naoshi Sakuma¹, Atsunobu Isobayashi¹, Mariko Suzuki¹, Atsuko Sakata¹, Akihiro Kajita¹, Tadashi Sakai¹ (LEAP¹)

Keywords:カーボンナノチューブ、ビア、プラズマCVD