[28a-G12-1~11] 17.1 Growth technology

[28a-G12-11] In-situ Conductivity Observation of Ni FIlms in Sputtering Depositions

^○Yuji Kusumoto¹, Kohei Matsumoto¹, Kazuki Sekiya¹, Hirofumi Koji¹, Hiroshi Furuta^1,2, Akimitsu Hatta^1,2 (Kochi Univ.Technol.¹, Inst.Nanotech., Kochi Univ. Technol.²)

Keywords:触媒微粒子、電気伝導性　その場評価、マグネトロンスパッタリング