[28a-G17-1~11] 12.7 Biological and medical engineering, biochips

[28a-G17-2] △Penetration capability of vapor-liquid-solid grown high-aspect-ratio silicon neuroprobes

^○（B）Satoshi Yagi¹, Tstsuya Imashioya¹, Hideo Oi^1,2, Makoto Ishida^1,2, Takeshi Kawano¹ (Toyohashi Tech¹, EIIRIS²)

Keywords:プローブ、Si、刺入