[28a-G19-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[28a-G19-1] Annealing Effect of β-Molybdenum Trioxide Films Grown by Molecular Beam Epitaxy

^○（M1）Ryota Wada¹, Shinji Yagi¹, Kazuto Koike¹, Yoshiyuki Harada¹, Shigehiko Sasa¹, Mitsuaki Yano¹ (Osaka Inst.of Tech., NMRC¹)

Keywords:三酸化モリブデン、MBE