The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

21. Joint Session K » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[28a-G19-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Thu. Mar 28, 2013 10:00 AM - 1:00 PM G19 (B5 4F-2403)

[28a-G19-11] Effects of Deposition Temperature and Annealing on V-doped ZnO Thin Films

Tatsuya Mori1, Takuya Matsuo1, Shuhei Okuda1, Hiroshi Chiba1, Katsuyoshi Washio1 (Tohoku Univ.1)

Keywords:酸化亜鉛、V、anneal