[28a-G19-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[28a-G19-9] Study of Crystal Structure of V doped ZnO Thin Film

^○Takuya Matsuo¹, Shuhei Okuda¹, Hiroshi Chiba², Tatsuya Mori², Katsuyoshi Washio^1,2 (Tohoku Univ. Graduate School of Engineering¹, Tohoku Univ. School of Engineering²)

Keywords:ZnO、Vドープ