The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[28a-G2-1~12] 13.3 Insulator technology

Thu. Mar 28, 2013 10:00 AM - 1:15 PM G2 (B5 1F-2102)

[28a-G2-12] Impact of Ga and Sb oxides on GaSb MOS interface properties

○（PC）Masafumi Yokoyama1, Yuji Asakura1, Haruki Yokoyama2, Mitsuru Takenaka1, Shinichi Takagi1 (Univ. of Tokyo1, NTT Photonics Labs.2)

Keywords:GaSb、半導体、MOS界面