[28a-G2-1~12] 13.3 Insulator technology

[28a-G2-8] △Control of Pr valence States and Crystalline Structures of Pr-oxides by H₂O Partial Pressure

^○Kimihiko Kato^1,2, Mitsuo Sakashita¹, Wakana Takeuchi¹, Noriyuki Taoka¹, Osamu Nakatsuka¹, Shigeaki Zaima¹ (Nagoya Univ.¹, JSPS Research Fellow²)

Keywords:Pr酸化膜、価数、ケッショウコウゾウ