[28a-G6-1~11] 13.5 Si process technology

[28a-G6-2] △High-Precision Alignment of Electron Tomography Tilt Series Using Markers Formed by Helium Ion Microscope

^○Misa Hayashida¹, Tomohiko Iijima¹, Masahiro Tsukahara¹, Shiniichi Ogawa¹ (AIST¹)

Keywords:電子顕微鏡、三次元、アライメント