BEOL InGaAs nMOSFETs on Polyimide

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

Thu. Mar 28, 2013 10:00 AM - 12:45 PM G6 (B5 1F-2106)

^○Tatsuro Maeda¹, Hiroyuki Ishii¹, Taro Itatani¹, Wipakorn Jevasuwan¹, Tetsuji Yasuda¹, Osamu Ichikawa², Masahiko Hata² (AIST¹, Sumitomo Chemical²)

Keywords:InGaAs、ポリイミド、BEOL