[28a-PA2-1~14] 7. Beam Technology and Nanofabrication

[28a-PA2-1] Practical use of the micro-beam equipment in SUNBEAM ID at SPring-8

^○Atsushi Sakaki¹, Tomoaki Kawamura¹, Amane Kitahara², Hiroshi Nozaki³, Shinji Ozaki⁴, Kazuhiro Ueda⁵, Akio Yoneyama⁵, Akira Nanbu⁵, Shintaro Umemoto⁶ (Nichia Corp.¹, Kobe Steel Ltd.², Toyota Central R&D Labs.³, Panasonic Corp.⁴, Hitachi Ltd.⁵, SPring-8 Service Co. Ltd.⁶)

Keywords:X線マイクロビーム、SPring-8、産業利用