[28a-PA2-1~14] 7. Beam Technology and Nanofabrication

[28a-PA2-14] Depth analysis of DSPC thin film by SIMS using gas cluster ion beam.

^○Shun’ichiro Nakagawa¹, Tosio Seki^1,2, Takaaki Aoki^1,2, Jiro Matsuo^1,2 (Kyoto Univ¹, JST-CREST²)

Keywords:SIMS