[28a-PA2-1~14] 7. Beam Technology and Nanofabrication

[28a-PA2-4] Quick reciprocal space mapping with a laboratory characteristic X-ray source

^○Wolfgang Voegeli¹, Tadashi Matsushita¹, Etsuo Arakawa², Tetsuroh Shirasawa³, Toshio Takahashi³ (KEK-PF¹, Tokyo Gakugei Univ.², ISSP, Univ. of Tokyo³)

Keywords:Reciprocal space mapping、X-ray、multilayer