[28a-PA2-1~14] 7. Beam Technology and Nanofabrication

[28a-PA2-6] Development of high-precision analysis of multilayer structure

^○Tatsuya Shiramizu¹, Hiroyuki Kawahara¹, Tetsuya Uetsuji¹ (Advanced Technology R&D Center, Mitsubishi Electric Corp.¹)

Keywords:二次イオン質量分析、飛行時間型二次イオン質量分析、オージェ電子分光分析