[28a-PA2-1~14] 7. Beam Technology and Nanofabrication

[28a-PA2-7] In-situ KFM observation of sample surface in IBE process

^○Daisuke Saida¹, Yuichi Ohsawa¹, Junichi Ito¹, Takuji Takahashi² (RDC, Toshiba¹, IIS, Univ. of Tokyo²)

Keywords:IBE、KFM