[28a-PA2-1~14] 7. Beam Technology and Nanofabrication

[28a-PA2-8] △Study on Dissolution Behavior of Polymer-bound and polymer-blended PAG Resists Using a Resist Development Analyzer

^○Hiroki Yamamoto^1,2, Takahiro Kozawa^1,2, Seiichi Tagawa^1,2 (ISIR, Osaka Univ.¹, JST-CREST²)

Keywords:レジスト溶解挙動、ポリマーバウンドPAGレジスト、ポリマーブレンドPAGレジスト