A Molecular Simulation of Electron Beam Lithography

Presentation information

Regular sessions(Poster presentation)

07. Beam Technology and Nanofabrication » 7. Beam Technology and Nanofabrication

Thu. Mar 28, 2013 9:30 AM - 11:30 AM PA2 (1st gymnasium)

^○Katsushi Michishita¹, Rina Takai¹, Masaaki Yasuda¹, Hiroaki Kawata¹, Yoshihiko Hirai¹ (Osaka Pref. Univ.¹)

Keywords:電子線リソグラフィ、分子動力学