[28p-A4-1~20] 16.3 Bulk, thin-film and other silicon-based solar cells

[28p-A4-1] Various formation techniques of textured surface in sputter-deposited Al-doped ZnO transparent electrodes for thin-film solar cells

^○Junichi Nomoto¹, Toshinori Yamanaka¹, Toshihiro Miyata¹, Tadatsugu Minami¹ (OEDS R&D Center, Kanazawa I.T.¹)

Keywords:透明導電膜、ZnO