[28p-A4-1~20] 16.3 Bulk, thin-film and other silicon-based solar cells

[28p-A4-2] Control of textured surface for ZnO:Al thin films using RF magnetron sputtering method with addition of water vapor

^○Shuhei Miura¹, Teruaki Kumazawa¹, Masaki Tashiro¹, Shuichi Nonomura¹ (Gifu Univ.¹)

Keywords:酸化亜鉛、テクスチャ、透明導電酸化膜