[28p-A6-1~8] 6.2 Carbon-based thin films

[28p-A6-2] △Effects of Chemical Bonding States on Photo-induced Changes of Amorphous Carbon Nitride Films

^○Tomo Harata¹, Masami Aono¹, Naoyuki Tamura¹, Nobuaki Kitazawa¹, Yoshihisa Watanabe¹ (NDA¹)

Keywords:アモルファス窒化炭素薄膜、光誘起変化