The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[28p-A6-1~8] 6.2 Carbon-based thin films

Thu. Mar 28, 2013 1:30 PM - 3:30 PM A6 (K1 3F-305)

[28p-A6-3] △DC electrical conductivity characterization of amorphous carbon nitride thin films prepared by reactive sputtering

Naoyuki Tamura1, Masami Aono1, Tomo Harata1, Nobuaki Kitazawa1, Yoshihisa Watanabe1 (NDA1)

Keywords:アモルファス窒化炭素薄膜、化学結合状態、電気特性