The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[28p-A6-1~8] 6.2 Carbon-based thin films

Thu. Mar 28, 2013 1:30 PM - 3:30 PM A6 (K1 3F-305)

[28p-A6-4] The substrate dependence of carbon nitride deposition using microwave plasma CVDⅡ

○Yusuke Takahashi1, Hitoe Habuchi2, Kouzi Watanabe2, Hirofumi Takikawa3 (Gifu Natl. Coll. Technol.1, Toyota Natl. Coll. Technol.2, Toyohashi Univ. Technol.3)

Keywords:窒化炭素