The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[28p-A6-1~8] 6.2 Carbon-based thin films

Thu. Mar 28, 2013 1:30 PM - 3:30 PM A6 (K1 3F-305)

[28p-A6-5] a-CNx:H Film CVD using Band Type Supermagnetron Plasma (II)

○Haruhisa Kinoshita1, Syunsuke Yagi1, Motoki Sakurai1 (Shizuoka Univ., Res. Inst. Elect.1)

Keywords:スーパーマグネトロンプラズマ