PDF Download Schedule 2 Like 1 [28p-B1-10] Study of high-resolution MEMS X-ray optics ○(M2)Tomohiro Ogawa1, Yuichiro Ezoe1, Ikuyuki Mitsuishi1, Takuya Kakiuchi1, Kazuhisa Mitsuda2, Takaya Ohashi1 (Tokyo Metropolitan Univ.1, ISAS/JAXA2) Keywords:X線結像光学系