[28p-B1-13] Realtime X-ray reflectometry
Keywords:薄膜・多層膜、埋もれた界面、時分割解析
Regular sessions(Oral presentation)
07. Beam Technology and Nanofabrication » 7.1 X-ray technologies
Thu. Mar 28, 2013 1:30 PM - 5:45 PM B1 (K2 3F-1301)
Keywords:薄膜・多層膜、埋もれた界面、時分割解析