The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.1 X-ray technologies

[28p-B1-1~16] 7.1 X-ray technologies

Thu. Mar 28, 2013 1:30 PM - 5:45 PM B1 (K2 3F-1301)

[28p-B1-3] Modeling spectrum of the plasma EUV sources for their optimization

○Akira Sasaki1 (JAEA1)

Keywords:EUV、レーザープラズマ、モデリング