[28p-B7-6~13] 1.7 Instrumentation and measurement

[28p-B7-12] Determination of the piezoelectric properties by the 3D Optical Microscope performs three-dimensional surface measurements

^○Masashi Seki¹, Akihiro Hanada¹, Hiroki Miura¹, Kentaro Kinoshita^1,2, Satoru Kishida^1,2 (Tottori Univ.¹, Electronic Display Research Center²)

Keywords:面内分布、圧電特性