[28p-C1-1~20] 4.2 Photonic nonostructures and phenomena

[28p-C1-7] Fabrication of 3D metallic photonic crystals by femtosecond direct laser writing and atomic layer deposition

^○Takaya Tokiwa¹, Quan Sun¹, Kosei Ueno^1,2, Hiroaki Misawa¹ (RIES-Hokkaido Univ.¹, PRESTO-JST²)

Keywords:3次元金属フォトニック結晶、フェムト秒レーザー、原子層堆積