[28p-C1-9] △Creation of 3D Photonic Crystals at Visible Wavelengths by Simultaneous, Three-Directional Etching
Keywords:3次元フォトニック結晶、プラズマエッチング
Regular sessions(Oral presentation)
04. Quantum Electronics » 4.2 Photonic nonostructures and phenomena
Thu. Mar 28, 2013 1:30 PM - 6:45 PM C1 (C6 1F-106)
Keywords:3次元フォトニック結晶、プラズマエッチング