[28p-D3-1~17] 6.1 Ferroelectric thin films

[28p-D3-11] Characteristics of Output power of MEMS Vibration Energy Harvesters Using BiFeO₃ Thin Films

^○Keisuke Wakazono¹, Kento Kariya¹, Takeshi Yoshimura¹, Shuuichi Murakami², Norifumi Fujimura¹ (Osaka Prefecture University¹, Technology Research Institute of Osaka Prefecture²)

Keywords:エナジーハーベスター、BiFeO3、圧電