[28p-D3-1~17] 6.1 Ferroelectric thin films

[28p-D3-17] Evaluations of Lateral and Vertical Piezoelectric Response in Ferroelectric Thin Films using Piezoelectric Force Microscopy

^○Shota Seto¹, Yusuke Takada¹, Seiji Nakashima¹, Hironori Fujisawa¹, Masaru Shimizu¹ (Univ. of Hyogo¹)

Keywords:圧電